摘要 |
PURPOSE:To obtain a low-cost detector which shuts off infrared rays of <=7mum wavelengths and senses infrared rays of a 7-16mum wavelength range by using an indium-antimony layer of >=0.1mum thickness as a filter. CONSTITUTION:A filter consisting of indium and antimony of >=1mum thickness is mounted to an infrared ray take-in window part provided to a container containing a pyroelectric pellet generating electric charge corresponding to the rate of change in incident infrared rays. For example, front and rear surface electrodes 10, 11 are mounted to a pyroelectric pellet 9 consisting of lithium tantalate or the like, and the pellet is mounted to a metal-made support base 12 by using a conductive adhesive material 13. Next, the entire part is put in a container 19, and a silicon single crystal plate 21 is mounted to an infrared ray take-in window 20 of the container. Further, a filter 22 made of an indium-antimony film vapor deposited to >=0.1mum thickness is attached to the inside surface thereof. The manufacture of this filter is easy, and the human body infrared ray detector or the like is manufactured inexpensively. |