| 摘要 |
PURPOSE:To measure the voltage of the irradiated area of a measured body at high speed with high precision by a simple device, by providing a device which performs deflection in the traveling direction of a secondary electron beam emitted by the measured body. CONSTITUTION:From the area of a measured body 3 irradiated with an electron beam 2 from an electron beam generator 1, a secondary beam whose quantity is determined by the nature, state, etc., of the irradiated area is emitted with some variation in initial velocity. An electromagnetic-field generator 90 for attracting the secondary electron is established an electromagnetic field opposite to a supporting body 4 and attracts the secondary electron to generate a secondary electron beam 7. Then, the extents of deflection of secondary electron beam deflection devices 81 and 82 where the outputs of two secondary electron beam detectors 61 and 62 arranged close to each other are detected and a conversion table is used to measure the potential of the irradiated area of the measured body 3. Consequently, the influences of the quantity of the primary electron beam, the material and shape of the measured body, etc., are eliminated. |
