| 摘要 |
PURPOSE:To minimize the width of an undercut section, and to improve the degree of integration by successively executing the various processes of the formation of a resist layer, exposure, development, removal through corrosion and exfoliation to a substrate with a layer to be corroded while repeating said processes and removing the layer to be corroded. CONSTITUTION:The layer to be corroded consisting of an oxide film 3 is shaped to the substrate 2. The layer is coated with the resist layer 5, both layers are exposed and developed through a mask 7 with a predetermined pattern, and the layer to be corroded is removed up to the depth d1 of half the thickness d0 of the layer. The width h1 of the undercut is approximately the same as d1 under this condition. The resist layer 6 is exfoliated, a resist layer is coated again, the same processes are repeated, a section 9 with W opening width is removed and the layer to be corroded 4 is removed by remaining depth up to the substrate. Accordingly, the width of the undercut section is minimized, and the pattern with excellent accuracy is formed. |
