| 摘要 |
PURPOSE:To improve the magnetic efficiency of the apparatus, to make it easy to generate a magnetic field and to reduce restrictions on design in scaling up the apparatus, by composing the vacuum container main body and the upper lid in the high speed sputtering apparatus of a material having large permeability. CONSTITUTION:Targets 21, 21 opposing to each other are retained by magnets 22, 22 and fixed via a insulating material 27 to each inner surface of the upper lid 28 and container main body 29 of the vacuum container, the inside of the container 29 is evacuated to become a vacuum, and a high voltage is applied between the target 21, vacuum container main body 29 and apper lid 28 by a high voltage electric source 26 to sputter a target metal on a substrate 24 on the substrate holder 25 by a glow discharge. In this case, the preparation of the container main body 29 upper lid 28 using iron material having high permeability results in the formation of magnetic circuit of the magnet 22 in a small magnetic gap through the vacuum container 29 and upper lid 28 and also results in improvement in magnetic efficiency. Restrictions on design in scaling up the apparatus are also reduced. |
