| 摘要 |
PURPOSE:To obtain a magnetic recording medium which is suited to recording of high density, by ionizing the evaporated particles under high vacuum and injecting the ionized particles to the surface of a base material with acceleration of electric field. CONSTITUTION:Power sources 21-25 are applied after setting a vacuum chamber 2 under high vacuum, and filaments 12 are electrically conducted and heated to emit heat electrons. At the same time, the filaments 12 and a guard 13 receive the application of negative DC voltage. Thus a crucible 11 is heated to evaporate ferromagnetic materials. The evaporated particles are led into a vapor ionizing part 10 to give the electric conduction and heating to filaments 14, and accordingly the heat electrons are emitted. At the same time, the negative DC voltage is applied to the filament 14 and a guard 16, and a mesh-type electrode 15 is grounded to give the field acceleration to the emitted electrons. These electrons are hit against the evaporated particles to be ionized. Then the negative DC voltage to the crucible 11 is applied to an ion acceleration electrode 8 to give the field acceleration to the evaporated particles to obtain ion beams. These beams are made to pass through the magnetic field of a DC-deflected beam 18 to be deflected. The deflected beam is injected onto the surface of a nonmagnetic base material 5 with an incident angle of >=30 deg. to the normal line of the material 5. |
