| 摘要 |
PURPOSE:To obtain the precist ink jet head having high reliability by a method wherein a photosensitive composition layer formed on a substrate surface is pattern- exposed, a cured region is shaped, a region not cured is removed and a groove is formed. CONSTITUTION:The photosensitive composition sheet 3, which is heated at 80- 105 deg.C and has 25-100mu thickness, is laminated on the surface of a substrate 1 to which ink discharge pressure generating elements 2 are disposed, a photo-mask 4 with a predetermined pattern 4P is stacked on the sheet 3, and exposed 5, and the sheet 3 except the pattern 4P is cured. The substrate 1 is immersed in an organic solvent and the region not cured is removed, the grooves 6-1, 6-2 formed to a cured photo-resist film 3H according to the pattern 4P, the whole is thermally treated for 10-60min at 130-160 deg.C, and the film 3H is cured. Consequently, the thickness of the walls of the grooves constituting ink flow paths is easily adjusted, and the ink jet head minutely worked is easily obtained in excellent yield. |
