COMPOSITION AND METHOD FOR FORMING MICROPATTERN

摘要

PURPOSE:To enhance the dimensional stability, working accuracy, etc. of a resist during development by blending a polymer with an aromatic azide compound or the compound and an aromatic compound having a vinyl group to prepare a composition. CONSTITUTION:A composition for forming a micropattern is obtd. by blending a polymer such as polymethyl methacrylate which has no aromatic ring in the principal and side chains and is easily removed by incineration in gas plasma with an aromatic azide compound or the compound and an aromatic compound having a vinyl group. The desired part alone of a coated film of said composition is irradiated with corpuscular radiation or electromagnetic waves, and the aromatic compound in the unirradiated part alone is inactivated in the coated film and removed in gas plasma to form a micropattern. The aromatic azide compound includes 4,4'-diazidodiphenyl ether.