| 摘要 |
This invention relates to a device for detecting the amount of deviation of the optical axis of laser beams from a predetermined point at which a workpiece is to be processed in a laser processing apparatus. The detector includes a laser resonator, a device for transferring the workpiece in the direction of both the X- and Y-axes, a base plate detachably mounted onto the workpiece transferring device, a plurality of image sensors disposed radially around the predetermined point located on the upper surface of the base plate, and a device for displaying the optical axis of the laser beams irradiated from the laser resonator to at least three of the plurality of image sensors, whereby the workpiece may be transferred so that the optical axis of the laser beams coincides with the predetermined point at which the workpiece is to be processed. In the detector, each of the plurality of image sensors includes a photoreceiving section in which a plurality of photoreceiving elements, made of semiconductor material, are arranged linearly. The device may also include a lens, adjustably mounted in the path of the optical axis, for converging the laser beams and a plurality of reflectors for deflecting the laser beams from the laser resonator to the upper surface of the baseplate. |
