摘要 |
PURPOSE:To improve the precision of the measurement of the wavelength of continuous or pulse light by using two interferometers which increase in interference length gradually and by making a sequential approximation of the wavelength of light to be measured from a known standard position on the basis of the position of the characteristics point of the measured light and the order of interference. CONSTITUTION:Light L0 to be measured or reference light L3 is split by beam splitters M0-M4 and applied to, for example, optical interferometers I1-I4 of Fabry-Pe rot etalon. The interferometers I1-I4 increase in interference length gradually and photodiode arrays R1-R4 convert interference rings projected from respective optical interferometers into electric signals, which are outputted to A/D converters AD1-AD4. Digital signals from the AD1-AD4 are supplied to a computer MC for wavelength calculation. The standard positions of the interferometers I1-I4 are found by the reference light L3, and the characteristic points are also found by the bright or dark point of the interference light of the measured light L0, thus finding primary - quadratic approximate wavelengths. |