| 摘要 |
PURPOSE:To inspect vacuum leakage at a connection part between the port of the internal wall of a vacuum container and the vacuum container easily and securely by blocking a part, communicating with the port of the internal wall, by a detachable lid and by evacuating the port in this state for the vacuum leakage inspection. CONSTITUTION:A port 6 is welded to a vacuum container 2 at a weld zone 8a. Further, a lid 10 is added to the internal wall part of the vacuum container 2 to block the opening part of the port 6, and welded to the vacuum container 2 at a weld zone 11. Then, the port 6 is sealed hermetically to the inside of the vacuum container 2 and a vacuum pump and a vacuum leakage inspecting apparatus are connected to a flange part 9 to evacuate the port 6, thereby inspecting vacuum leakage easily at the fitting part between the port 6 and vacuum container 2, i.e., the weld zone 8a. After the inspection, the lid 10 is removed at the weld zone 11 to complete the port 6 communicating with the inside of the vacuum container 2. |
