发明名称 |
Impermeable cooled closing plug for processing tubes, in particular in semiconductor manufacture |
摘要 |
An impermeable cooled closing plug adapted for closing the end of a semiconductor manufacture processing tube is made of a material selected from the group consisting of quartz, silicon and silicon carbide, which materials have low heat conductivity and high chemical stability. The cooling effects of a cooling liquid supplied to the entrance flange of a processing tube are isolated from the tube closing plug by virtue of the low heat conductivity, thus preventing unwanted condensation effects at the entrance of the tube.
|
申请公布号 |
US4318889(A) |
申请公布日期 |
1982.03.09 |
申请号 |
US19800204540 |
申请日期 |
1980.11.06 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
SCHILLER, PETER |
分类号 |
H01L21/31;B01J3/03;B01J19/00;C30B25/08;C30B31/10;F16L53/00;F16L55/10;H01L21/22;(IPC1-7):F28D21/00 |
主分类号 |
H01L21/31 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|