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经营范围
发明名称
METHOD AND DEVICE FOR EXPOSING ELECTRON BEAM
摘要
申请公布号
JPS5740700(A)
申请公布日期
1982.03.06
申请号
JP19800115519
申请日期
1980.08.22
申请人
NIPPON DENSHI KK
发明人
TANAKA KAZUMITSU;GOTOU NOBUO;MATSUDA OSAMU;YUASA TETSUO
分类号
G21K5/04;H01L21/027
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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