发明名称 |
Beta ray back-scattering appts. - for thin film measurement using beta point source, aperture ring and geiger-mueller counter on adjustable mounting |
摘要 |
<p>Thin films are measured by beta ray backscattering. The measuring appts. includes a beta point source supported coaxially with an aperture ring and a Geiger-Muller counter. Axial spacing is adjustable using two axially movable partial tubes with fine adjustment. A locking arrangement is provided for the fine adjustment. The tubes are connected to the anode and cathode of the counter. The device is compact and formed as a readily replaceable unit. It can be accurately set for work with very small apertures.</p> |
申请公布号 |
FR2489519(A1) |
申请公布日期 |
1982.03.05 |
申请号 |
FR19800018689 |
申请日期 |
1980.08.28 |
申请人 |
FISCHER GMBH CO INSTITUT ELEKTRO |
发明人 |
HELMUT FISCHER, WILLI STEEGMULLER ET WERNER VOLZ;STEEGMULLER WILLI;VOLZ WERNER |
分类号 |
G01B15/02;(IPC1-7):01N23/00;01B15/02 |
主分类号 |
G01B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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