发明名称 Beta ray back-scattering appts. - for thin film measurement using beta point source, aperture ring and geiger-mueller counter on adjustable mounting
摘要 <p>Thin films are measured by beta ray backscattering. The measuring appts. includes a beta point source supported coaxially with an aperture ring and a Geiger-Muller counter. Axial spacing is adjustable using two axially movable partial tubes with fine adjustment. A locking arrangement is provided for the fine adjustment. The tubes are connected to the anode and cathode of the counter. The device is compact and formed as a readily replaceable unit. It can be accurately set for work with very small apertures.</p>
申请公布号 FR2489519(A1) 申请公布日期 1982.03.05
申请号 FR19800018689 申请日期 1980.08.28
申请人 FISCHER GMBH CO INSTITUT ELEKTRO 发明人 HELMUT FISCHER, WILLI STEEGMULLER ET WERNER VOLZ;STEEGMULLER WILLI;VOLZ WERNER
分类号 G01B15/02;(IPC1-7):01N23/00;01B15/02 主分类号 G01B15/02
代理机构 代理人
主权项
地址