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发明名称
PLANAR TECHNIQUE FOR PRODUCING SEMICONDUCTOR MICROCOMPONENTS
摘要
申请公布号
US3676126(A)
申请公布日期
1972.07.11
申请号
USD3676126
申请日期
1970.01.19
申请人
SIEMENS AG.
发明人
PETER ALBUS
分类号
H01L21/00;H01L21/316;(IPC1-7):G03C5/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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