发明名称 |
SYSTEM FOR CHECKING A PATTERN ON A FLAT BASE |
摘要 |
A system for testing a pattern recorded on a plate with a high density in relation to a reference pattern, comprising means for analyzing the pattern with a line detector and a logic circuit for processing the data supplied by the detector and data relating to the reference pattern, the two patterns being described line-by-line. The logic circuit is intended to detect the errors while admitting for each line a shift between the two patterns of one unit in a direction X or in a direction Y perpendicular to X, the maximum shift allowed for the entire pattern amounting, for example, to three units in each direction. |
申请公布号 |
DE2961852(D1) |
申请公布日期 |
1982.03.04 |
申请号 |
DE19792961852 |
申请日期 |
1979.03.16 |
申请人 |
THOMSON-CSF |
发明人 |
LACOMBAT, MICHEL;DESPERQUES-VOLMIER, SERGE |
分类号 |
G03B27/32;G01B11/00;G01B11/02;G01B11/24;G01B11/245;G01N21/956;H01L21/027;H01L21/66;(IPC1-7):G01B9/08;G01J1/12;G01N21/31;H05K13/08 |
主分类号 |
G03B27/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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