发明名称 X-RAY GENERATOR DEVICE
摘要 PURPOSE:To prevent evaporation of diamond and use it as a stable X-ray source with high brightness by imbedding a diamond target in a metal substrate material, water-cooling and rotating the metal substrate, irradiating electron rays on its surface, and generating X rays. CONSTITUTION:A diamond 2 is imbedded in the copper metal substrate material of a water cooling copper target 1 by the powder sintering method and the diamond content copper target 1 is formed. An axis of revolution 3 is mounted on this target 1 and arranged in a vacuum chamber 8 so as to rotate. Then water cooling inlet 4 and outlet 5 are mounted on the axis of revolutin 3, water-cooled, and revolved. An electron ray 6 is irradiated on the surface and X rays are generated. As a result, the thermal conduction of the diamond can be improved and a stable X-ray source be obtained with high brightness without any damages caused by the evaporation of the diamond.
申请公布号 JPS5738548(A) 申请公布日期 1982.03.03
申请号 JP19800115024 申请日期 1980.08.21
申请人 SUWA SEIKOSHA KK 发明人 IWAMATSU SEIICHI
分类号 H01J35/10;H01L21/027 主分类号 H01J35/10
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