MANUFACTURING APPARATUS FOR FINE POWDER OF SILICON CARBIDE OR SILICON NITRIDE

摘要

PURPOSE:To obtain a product having submicron grain size in a high yield by attaching an agitating and mixing device to the titled apparatus so as to agitate and mix starting materials with heating when the materials are continuously conveyed to the reaction tube and reacted. CONSTITUTION:Mixed starting materials for manufacturing fine powder of silicon carbide or silicon nitride are dropped on a screw conveyor 5 from a hopper 3 and continuously fed to the high temp. part of a reaction tube 6 set in a heating element 10 with the conveyor 5. The materials are well agitated and mixed at the reaction temp. with an agitating and mixing device 7 which is movable in synchronism with the conveyor 5 or independently, whereby the contact of SiO formed in the reaction process with carbon as well as the contact between the starting materials is made perfect to allow the reaction to proceed uniformly at a relatively low temp. The reaction product is introduced into a cooling chamber 9 and taken out of an outlet 16 through a storage chamber 13 and a preparatory chamber 15.