| 摘要 |
PURPOSE:To obtain an insulating film having excellent adhesive property by forming an Al2O3 layer between a Si resin layer and a polyimide resin layer. CONSTITUTION:The Al2O3 layer is deposited on the insulating layer in Si resin in 300-5,000Angstrom thickness through sputtering, the protective layer of polymide resin is stacked on the Al2O3 layer and the whole is cured. According to this constitution, the polyimide resin does not exfoliate even when the whole is boiled for approximately five hrs. at 350 deg.C, and the protective film having high reliability is obtained. |
