| 摘要 |
PURPOSE:To prevent excessive purification of air in a clean room and to thereby save the power required for driving fans, by detecting the necessary draft of air in the clean room automatically through checking of dust conditions in the clean room. CONSTITUTION:Air in a clean room 1 is sampled by a dust sensor 8, and an electric signal indicating the dust conditions in the room 1 is given to a dust counter 9. The counter 9 checks the dust conditions in the room 1 and gives an electric signal to a microcomputor 10, which in turn judges whether the draft of air in the clean room 1 is to be increased or decteased and affords an instruction signal to an air supply means 2. In response to the instruction signal, fans 5 feed air through a duct 3 at a required draft rate and issues the same from outlet ports 4 into the clean room 1. |
