| 摘要 |
PURPOSE:To realize a pressure gage not restricted by working temperature and not affected by static pressure by a method wherein pressure to be measured is applied to a cylindrical vibrator, and the vibrator is vibrated is a plurality of vibration modes simultaneously for detecting the pressure to be measured applied to said vibrator. CONSTITUTION:For a vibrator 1, thin cylinder part 13 and a thick cylinder part 14 continued therefrom are formed by a hole 12 bored along the central axis. Further, in a cylindrical part 14 near a step part 11 of the vibrator 1, four counterbore holes 15-18 are formed at 90 deg. intervals. Piezoelectric elements 2-5, charge amplifiers 60, 70, coefficient circuits 80, 90 and others form a driving part for driving the vibrator 1, and said driving part not only performs detection of vibration of the vibrator 1 about signals due to the second and the fourth vibration modes, but is constituted such that enforced force with which the vibrator 1 deformes with the second vibration modes is applied to said vibrator 1. Hereby, a pressure gas without being restricted in working temperature and being affected by static pressure is realized. |
