| 摘要 |
PURPOSE:To stabilize the bonding load of a wire bonding device by conically engaging both ends of a supporting shaft to a support in the device and magnetizing the ends of the shaft and the support engaging part in the same polarity, thereby supporting it in noncontacted state. CONSTITUTION:The intermediate part of a bonding arm 3 is secured to a support 4. A supporting shaft 5 having both conical ends is inserted into the support 4 perpendicularly crossing the arm 3. The conical parts of the support 5 are engaged via infinitesimal gap to the conical recess 13 of the bearing block 12 of a support 8. The support 5 and the block 12 are made of magnetic material magnetized in the same polarity and are supported in noncontacted state by the magnetic force. In this manner no frictional force is produced between the supporting shaft and the support, and the bonding load at the time of bonding can be stabilized. |
