发明名称 BONDEINGUSOCHI
摘要 PURPOSE:To freely control the height of a bonding tool by rotating a supporting shaft becoming a rocking center perpendicularly crossing a bonding arm having the bonding tool at the end in such a manner that the center of the shaft is displaced from the center of the supports at both ends of the supporting shaft. CONSTITUTION:A bonding arm 3 having a capillary 2 at the end is secured to a supporting block 4. A supporting shaft 5 perpendicularly crossing the arm 3 is rotatably inserted through the lower part of the supporting block. Both ends of the shaft 5 is rotatably mounted at a support 7. Since the center of the central part of the support 5 is displaced by e from the center of both ends of the support 5 when a control motor 13 is operated to rotate the shaft 5, the central part of the shaft is elevationally moved up and down by the rotation of the shaft 5 with respect to the support 7. Thus, the bonding arm is elevationally moved, thereby varying the height of the capillary 2. In this manner, the height of the bonding tool can be simply controlled.
申请公布号 JPS5736837(A) 申请公布日期 1982.02.27
申请号 JP19800111713 申请日期 1980.08.15
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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