发明名称 OPTICAL DISPLACEMENT MEASURING DEVICE
摘要 PURPOSE:To simplify a measuring device system and to standardize a processing data of a measured result, by prociding a light source, a displacement reactive device by which size of a list is varied in accordance with displacement of an object to be measured, a photoelectric converting element, etc. CONSTITUTION:This device is provided with a light source 1, and a displacement reactive device 2 which has a slit 5 for transmitting a light beam of this light source 1, and varies the size of this slit 5 in response to displacement Mv of an object to be measured. Also, it is provided with a photoelectric converting element 4 for inputting the light beam which has passed through the slit 5 of this displacement reactive device 2, and converting it to an electric quantity, and a processing circuit for relatively operating an output of this photoelectric converting element 4 by relation to a refernce light source. For instance, the displacement reactive device 2 consists of a fixed light screening plate 2a and a moving light screening plate 2b, and when the moving light screening plate 2b moves in response to displacement of the object to be measured, size of the light transmitting slit 5 is varied.
申请公布号 JPS5735714(A) 申请公布日期 1982.02.26
申请号 JP19800110902 申请日期 1980.08.12
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 OKANO TETSUYA;SUGANO YOSHIHIRO;UENO SHIGERU
分类号 G01D5/36;G01B11/00;G01D5/34;G01D5/347 主分类号 G01D5/36
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