AUFDAMPFVERFAHREN ZUM HERSTELLEN VON UNIPOLAREN DUENNSCHICHTTRANSISTOREN,申请号DE19641489042-传众专利搜索

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发明名称	AUFDAMPFVERFAHREN ZUM HERSTELLEN VON UNIPOLAREN DUENNSCHICHTTRANSISTOREN
摘要
申请公布号	DE1489042(B2)	申请公布日期	1972.10.19
申请号	DE19641489042	申请日期	1964.12.28
申请人		发明人
分类号	C23C14/04;H01L23/29;H01L29/00;(IPC1-7):01L11/14	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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