| 摘要 |
PURPOSE:To measure microscopic displacement and inclination of a surface, by putting in order and bundling the ends of two or more photodetecting optical fibers, centering around one projecting optical fiber, and measuring the quantity of light reflected by the surface to be measured. CONSTITUTION:A light beam is projected from a projecting optical fiber 6, and a reflected ray from a surface 8 is detected by a photodetecting optical fiber 10. In case when the short diameter l of a shaded portion where a conical light beam is overlapped on a conical range, as shown in the figure is < the diameter D of the fiber, the light beam which has been reflected by the shaded portion is all detected by a photodetecting optical fiber 4, and its quantity of light increases linearly up to a distance d3, and after that, decreases linearly. In the case, on both sides of a projecting optical fiber 12 are made to adhere closely and placed photodetecting optical fibers 14, 16, and they are photoelectrically converted by making a reflected ray from the surface 8 incident. In this case, when there is a difference between detected values, inclination of the surface is derived, and when there is no difference, displacement of the surface is derived from a variation of detected values. When the photodetecting optical fiber is placed, for instance, like cross-shaped 4 groups, said measurement is executed crosswise at the same time. In this way, microscopic displacement and inclination are measured. |
