发明名称 EXCIMER LASER DEVICE
摘要 PURPOSE:To output a high-energy laser beam by using a simplified structure without synchronous control by a method wherein laser oscillation is initiated on a discharge electrode common to an oscillation stage and amplification stage and thereafter the output is amplified in an optical resonance element. CONSTITUTION:A laser beam induced by an arc discharge between discharge electrodes 9a and 9b is thrown into resonance by an etalon 4 and mirrors 5 and 10, and the resultant laser beam is amplified by a spherical mirror 13 and front mirror 14 before being outputted.
申请公布号 JPS63229875(A) 申请公布日期 1988.09.26
申请号 JP19870064924 申请日期 1987.03.19
申请人 KOMATSU LTD 发明人 ITAKURA YASUO;ITOU NORIAKI;FUJIMOTO JUNICHI
分类号 H01S3/034;H01S3/03;H01S3/08 主分类号 H01S3/034
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