发明名称 PRODUCTION OF COLOR FILTER
摘要 <p>PURPOSE:To produce a color filter without causing damages on a vapor deposited dye layer by forming a mask pattern on said layer by using a chalcogen glass layer formed on this layer then selectively removing the colored layer. CONSTITUTION:A vapor deposited colored layer 2 is formed on a substrate 1 and a chalcogen glass layer 3 is formed thereon. Pattern exposure 7 is then made thereon through an original pattern 4, after which the chalcogen glass layer in the exposed part is etched off, whereby a master pattern 5 is formed. Thence, the vapor deposited colored layer not covered with the mask pattern 5 is removed with a prescribed etching process, whereby color elements 6 are formed. Thence, the treatment for removing the pattern 5 is carried out. If an uncolored, transparent or extremely pale pattern is used for this mask pattern 5, there is no particular need for this treatment process.</p>
申请公布号 JPS5734506(A) 申请公布日期 1982.02.24
申请号 JP19800108839 申请日期 1980.08.08
申请人 CANON KK 发明人 IMATAKI HIROYUKI;FUKUDA YOSHIAKI
分类号 G02B5/20;G02B5/23;G03C5/56;H01L27/14;H04N9/07 主分类号 G02B5/20
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