摘要 |
PURPOSE:To enable the pulverization of a glass-forming liquid raw material and the transport of the particles without contamination, by transmitting ultrasonic wave to the glass-forming raw material through a polymer membrane separating the raw material holding part and the ultrasonic vibration generator of the pulverization vessel. CONSTITUTION:The inside space of the pulverization vessel 7 is separated into the upper and the lower chambers by the polymer membrane 10. The upper chamber (liquid reservoir) holds the glass-forming raw material 8, and the lower chamber is filled with the ultrasonic transmission medium 11. The polymer membrane 10 is made of, e.g. polyethylene, polytetrafluoroethylene, etc. and the ultrasonic vibrator 9 is, e.g. a piezovibrator. The ultrasonic wave generated by the ultrasonic vibrator 9 is transmitted through the ultrasonic transmission medium 11 and the polymer membrane 10, and oscillates and pulverizes the glass-forming raw material 8. The pulverized glass-forming raw material 8 floats in the upper space of the pulverization vessel 7. The particles are transported to the high temperature reactor 4 with the transporting gas controlled by the flow controller 3. |