| 摘要 |
PURPOSE:To eliminate the influence of distributed capacities by insulating stationary electrodes and a movable electrode, containing the same into a conductive internal case, containing the internal case into a conductive external case and insulating between both cases. CONSTITUTION:After stationary electrodes SP1, SP2 and a movable electrode MP are contained in a conductive internal case F1, the case F1 is further contained in a conductive external case F2. Between the cases F1 and F2 are electrically insulated by an insulating material I and the electrodes SP1, SP2, MP are secured at their root parts via the material I to the case F1, whereby the respective electrodes SP1, SP2, and MP are also insulated electrically from the case F1. When mechanical displacing force is applied to the leading end part of the electrode MP, a deflection is produced, by which the electrostatic capacity between the electrodes SP1 and SP2 is changed differentially. With such constitution, the influence of distributed capacities is eliminated and the miniaturization of the sensor is realized. |
