| 摘要 |
PURPOSE:To improve operation efficiency by forming an opening, which can be sealed hermetically by means of a port supportint base, at the lower surface of a furnace core tube. CONSTITUTION:The supporting base 14 is positioned just under the opening 13 of the lower surface of a wafer going-in-and-out section 11. When a cradle 16 for a boat 4 holding wafers 3 is carried and placed on the base 14, the base 14 rises, the cradle 16 is inserted into the opening 13 and the opening is sealed. The nose of a bar 15 is connected to a notch 17, the bar 15 is driven and carried to a predetermined position 8, an inserting hole for the bar 15 is sealed hermetically by means of a projecting section 18, and the furnace core tube 1 is brought to a completely sealed condition. The bar is taken out through reverse operation after diffusion is completed. According to ths constitution, operating efficiency is improved largely. |
