| 摘要 |
PURPOSE:To prevent the melting of a target due to deficient cooling by soldering a cathode to the target with a low-m.p. soldering alloy in a conical magnetron sputtering gun. CONSTITUTION:In the conical magnetron sputtering gun, an anode 14 is set at the center of the cylindrical cathode 11, and the annular target 13 is arranged in the annular recess of the cathode 11. At this time, the low-m.p. soldering alloy 12 is interposed between the cathode 11 and the target 13, the alloy 12 is melted by a heater 15 to solder the cathode 11 to the target 13, and cooling water is passed through a cooling water passage 16 to solidify the alloy 12. High heat conduction can be secured between the target 13 and the cathode 11, and an accident such as the melting of the target 13 due to deficient cooling in sputtering can be prevented. |
