| 摘要 |
PURPOSE:To rationalize manufacture of an IC by a method wherein a pedestal part to put a wafer thereon is arranged at the center, various kinds of treating devices are arranged radially, and the wafer is transported to the treating devices constantly via the pedestal part by a transporting means to receive treatment and is made to come back to the pedestal part. CONSTITUTION:The wafer being put on the center pedestal part 30 is transported through an air track 50 via an auxiliary pedestal 52 to one of the treating devices 32 extending radially to receive treatment, comes back again to the pedestal part 30 through the air track and is transported to the treating device 34 to receive another treatment, and comes back to the pedestal part 30. After then receives samely treatments of the treating devices 36...48, and is finally taken out from the pedestal part 30. At this time, command of transportation or wait, etc., of the wafer is performed by a computor, and the radial treating group may be arranged in plural number. Accordingly flow of manufacture of the IC is rationalized, the number of the treating devices is reduced, and change of treating process is facilitated. |
