| 摘要 |
PURPOSE:To individually discriminate various kinds of gas, by combining the plural gas detecting elements having different selectivities mutually with controlling circuit and alarm device. CONSTITUTION:Detecting part is composed of an N silicon wafer 1, P diffused resistors 2a, 2b, the first gas detecting element thin film 3a added Pt or Pd to an SnO2 and the second gas detecting element thin film 3b consisting of LaNi(1-y) FeyO3 of oxide having perovskite structure and these detecting films 3a, 3b are formed on each resistor 2a, 2b through an SiO2 insulation film 23 by a gas phase growth method. Also, a bias terminal 4 of thin Al film is electrically connected with one end of the films 3a, 3b. Furhter, an alarm lamp is turned on and off by the signal of detecting part. Hereby, the various kinds of gas can be discriminated. |
