发明名称 MANUFACTURE OF MASK FOR SEMICONDUCTOR PROCESSING
摘要 PURPOSE:To simplify the manufacture of the glass substrate having a surface of optional curvature by a method wherein an etching is performed on the glass using the convex-lens formed photoresist film which is selectively provided on the glass substrate as a mask. CONSTITUTION:A photoresist is selectively applied on a quartz plate 1 of 0.5mm. or thereabouts in thickness, the photoresist film of a convex-lens form is applied utilizing the surface tension of the resist itself, a convex-lens form curved surface 3 is formed by performing an ion etching on the quartz plate using said photoresist film as a mask and then the damaged surface is smoothed by performing a heat treatment. As a result, when the laser annealing is performed using the above-mentioned procedures, desired annealing pattern can be obtained and also the above can be used as a focussing lens for a photo semiconductor.
申请公布号 JPS5730340(A) 申请公布日期 1982.02.18
申请号 JP19800104637 申请日期 1980.07.30
申请人 FUJITSU LTD 发明人 BABA YASUO
分类号 G03F1/00;G03F1/54;H01L21/268 主分类号 G03F1/00
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