| 摘要 |
PURPOSE:To adhere the entire surface of a metallic film on background layer and to avoid partial peeling, by making smaller the shape of the 1st layer closer to the surface than the shape of the 2nd layer beneath it. CONSTITUTION:An electrode film of a quartz oscillator made with photoetching technology or a frequency adjusting metallic film is taken as a lamination film made of >=2 different metals, and for example, a metallic film (e.g. Cr) 2 with good adhesive strength to quartz is formed to a quartz bar 1 of wafer, an electrode film (e.g. Au) 3 is entirely attached on it, required part is protected with resist, and unnecessary part is molten. The shape of the electrode film 3 of the upper layer is made smaller than the shape of the metallic film 2 at the lower layer, to avoid side etching. |
