| 摘要 |
PURPOSE:To position a semiconductor optical element and an optical fiber simply when coupling the optical element and the fiber by forming a positioning pattern consisting of an electrode material film conformed to an outside diameter of the optical fiber on the surface of the optical element. CONSTITUTION:An N type Ga0.7A0.3As layer 2 is grown on an N type GaAs substrate 1 and coated with a SiO2 film 3, a window is opened and Zn is diffused, a P type layer 4 reaching the surface of the substrate 1 is shaped, and a PN junction is formed. The film 3 is removed and the whole surface is coated with an AuZn film 5, only an upper section of the layer 4 is left as an ohmic electrode 6 at the P side, another film 5 is removed through etching and the whole surface is coated with a SiO2 film 8 again. Only the film 8 surrounded by the electrode 6 on the region 4 of the film 8 is removed, a light emitting surface 9 of the region 4 is exposed, the whole surface is coated with a resist, and the resist except an electrode extracting section 10 at the P side and patterns 11 for positioning is removed. The whole surface is coated with a Cr-Au layer, the resist is melted, and the patterns 11 for positioning the fiber are each left at the extracting section 10 and the both sides. |
