DEVICE FOR MEASURING DIMENSIONAL PARAMETERS OF MASK TOPOLOGY,申请号SU19802921957-传众专利搜索

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发明名称	DEVICE FOR MEASURING DIMENSIONAL PARAMETERS OF MASK TOPOLOGY
摘要
申请公布号	SU905633(A1)	申请公布日期	1982.02.15
申请号	SU19802921957	申请日期	1980.05.12
申请人	GOMAN LEONID V,SU;ZAVINA BELLA A,SU;SAVIKOVSKIJ ARKADIJ,SU	发明人	GOMAN LEONID V,SU;ZAVINA BELLA A,SU;SAVIKOVSKIJ ARKADIJ I,SU
分类号	G01B11/02;(IPC1-7):G01B11/02	主分类号	G01B11/02
代理机构		代理人
主权项
地址

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