| 摘要 |
PURPOSE:To improve operationality of an ion generator and gas efficiency by connecting the ion generation location by the crossed field discharge to a vacuum device so that the vacuum conductance of the opening section on the first cathode surface can exceed the conductance of other parts. CONSTITUTION:A vacuum container 5 is airtightly sealed in a connection fixture 27. The connection fixture 27 is airtightly welded on a nonmagentic stainless steel cylindrical body 28 and the cylindrical body on a flange 29, respectively. Besides, the flange 29 is airtightly connected to the flange 31 of a vacuum device through the base flange 30 of a beam line. An electrostatic lens system 14 is fixed to the cylindrical body 32 which is mounted on the base flange 30 and fed through leads which pass through the inner part of the cylindrical body 32. On the other hand, a cathode 3 is fixed to the cylindrical body 28 through a flange 33 and grounded electrically by a conduction passage consisting of the flange 33, cylindrical body 28, and the flanges 29-31 together with the vacuum device. |
