| 摘要 |
PURPOSE:To preferably adhere a pellet without crack of the pellet by synchronizing X-direction and Y-direction scrubbing operations with one another. CONSTITUTION:X-direction and Y-direction scrubbing operations are lagged by T=1/4 period, and are synchronized in both scrubbing operations at every 1/4 period. The period in which the time t is elapsed while the X-direction scrubbing amount (a) remains constant and exhibits waiting time. According to this configration the locus of the synthesized scrubbing operation approaches the ideal circular motion, the crack of the pellet can be eliminated, and the pellet can be preferably adhered. |
