| 摘要 |
PURPOSE:To form homogeneous films of very fine particles by placing a tube between an evaporation source and substrates set over the source and leading very fine particles from the source to the substrates by the inducing action of the tube. CONSTITUTION:A tube 12 is placed at an almost central posistion of a vacuum vessel 11. A tungsten boat 13 for resistance heating is put in the tube 12, an evaporating material 14 is mounted on the boat 13, and substrates 15, 16 are set at the upper part of the vessel 11. The interior of the vessel 11 is vertically divided by a partition plate 17 having a plurality of through holes 25, and a heating element 18 is set at the upper part of the tube 12. The vessel 11 is evacuated through an exhaust port 19, gaseous Ar is introduced from an inlet 20, and by electrifying the boat 13, the material 14 is evaporated to generate very fine particles. The particles rise smoothly along convection curves 21, 22 formed by the tube 12. The convection is further accelerated by the element 18. Accordingly, uniform films of very fine particles are formed on the substrates 15, 16. Very fine particles not deposited on the substrates are shielded by the plate 17, so they do not enter the tube 12 again. |
