MANUFACTURE FOR PRESSURE SENSOR OF OPTICAL PLANE GLASS FILM AND HIGH-TEMPERATURE VAPORIMETER USING IT

摘要

PURPOSE:To stably actuate a titled sensor even at high temperature and measure with high reliability by welding the fringe part of a parallel plane glass plate to a protection board with fine flame, thereafter polishing the plate up to a prescribed thickness through feeding sand to the same. CONSTITUTION:The thin part of a quartz glass plate 1 is welded to a protection board 2 previously welded to a quartz glass tube 3. An adhesive is injected between the quartz glass plate 1 and the protection plate 2 to fix the quartz glass plate 1 onto a protection film 2. A jig 5 is fixed onto a jig 4 with a setscrew, the quartz glass plate 1 is set on the center and the quartz glass tube 3 is fixed on the jig 5 with molten pine resin 7. The quartz glass plate 1 is polished together with the auxiliary glass 6 until the surface of the quartz glass plate 1 attains to the same height as that of the under surface of the jig 4 while feeding sand. The 4 jig is removed and the surfce of the quartz glass plate 1 is polished together with the auxiliary glass 6 to finish so as to make up an optical plate. Finally, the optical plate is heated in vacuum to complete a pressure sensor.