发明名称 MEASUREMENT OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To imorove the testing efficiency of a semiconductor such as IC by connecting a lead pin of a semiconductor device on an insulator to a contact pin of a fixed substrate movable vertically. CONSTITUTION:Lead pins 12 of a semiconductor device 11 which are placed on recesses 21 of an insulated belt 17 or the like are connected to contact pins 19 of a low resistance with the elasticity of a vertically movable fixed substate 18 and the device 11 is tested with a measuring device 15 through the contact pins 19. The connection state between the pins 12 and the pins 19 can be inspected visually through a through hole provided in the substrate 18. This improves the testing efficiency of the semicondutor with a construction of facilitating automation of the measurement.
申请公布号 JPS5722573(A) 申请公布日期 1982.02.05
申请号 JP19800097808 申请日期 1980.07.17
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 SUGAWARA SHINOBU
分类号 G01R31/26;G01R31/28;H01L21/66 主分类号 G01R31/26
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