| 摘要 |
PURPOSE:To determine the optimum composition ratio of elements and improve the superconductivity characteristic by laminating multiple types of compound thin films containing one of component elements of a superconductor and applying the heat treatment. CONSTITUTION:La2O3 is used as a target, the high-frequency spattering is performed in the Ar gas atmosphere to form an La2O3 thin film 2 on a sapphire substrate 1. Next, SrO is used as a target to form an SrO thin film 3, subsequently CuO is used as a target to form a CuO thin film 4, the preset number of them are repeatedly laminated to form a laminated thin film 5. The composition ratio of component elements of a superconductor in the laminated thin film is determined by controlling the thickness of each layer film. The film 5 is heat-treated and relatively diffused in a vacuum, and a uniform superconducting thin film is obtained. No target for the new composition ratio is required to be formed when the composition ratio is changed.
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