| 摘要 |
PURPOSE:To improve the sensitivity and the oxygen plasma resistant property of the titled composition by using the composition contg. a specified alkaline soluble siloxane polymer for the titled composition. CONSTITUTION:The titled composition contains a silicone resin shown by formula I or II, an orthonaphthoquinone compd. shown by formula III and the polymers contg. repeating units shown by formulas IV and V respectively. In the formulas, X is R-C(=O)- or R-C(-OH)H- group (wherein R is a hydrocarbon group), etc., R'-R''' are each hydroxyl or alkyl group, etc., (l), (m), (n) and (p) are each 0 or a positive integer, Z is -OH or -OCl group, etc., R4 is hydrogen atom or phenyl group, etc., Y is hydrogen atom or alkyl group, etc., T is -S(=O)2-, or -O-C(=O)-O- group, R5 is hydrogen atom or alkyl group, etc. And, the photosensitive composition contains preferably the resin shown by formula I or II and the compd. shown by formula III, and the radiation sensitive composition contains preferably the compd. shown by formula I or II, and the polymer contg. the repeating unit shown by formula IV or V. |
