| 摘要 |
PURPOSE:To decrease the operating temperature by constituting the contact part between a sensing film comprising ultrafine particles of oxide and taking out electrodes by Pd, and enhancing sensitivity to methane or bydrogen. CONSTITUTION:An evaporating material such as Pd is contained in a boat 13. Oxide 16 such as Sn is contained in a boat 15. The boats 13 and 15 are set in a vacuum evaporator 11, wherein an insulating substrate 1 is attached to a specimen 12. An electrode forming mask is set on said substrate 1, and a vacuum pump which is connected to an exhaust port 17 is actuated, and a device 11 is evaporated. The boat 13 is conducted from a power source 18, the material 14 is evaporated, and the taking out electrodes 2 and 3 comprising a Pd evaporated film are formed on the substrate 1. Then the electrode forming mask is chaged to an ultrafine particle forming mask, and oxygen gas is introduced from an introducing port 19. Thereafter the boat 15 is conducted from the power source 20 and heated to evaporate the oxide 16. The sensing film 4 comprising the ultrafilne particles of oxide is formed on the substrate 1. |
