| 摘要 |
PURPOSE:To reduce test time and improve the efficiency of tests requiring random test patterns by operating plural test heads simultaneously or by changing over these by every one test unit. CONSTITUTION:The test patterns transferred from a control part to a delivery part 12 are formed to prescribed waveforms by a format forming circuit 41, after which they are applied via multiplexers 44, 45, and the drivers for test heads to the input pins of the device LSI to be tested. The outputs of the device LSI are applied to decision parts 49, 50 constituting a comparing part 17, where they are compared with comparison patterns which are transmitted from a holding register 48 and are references. The device outputs differing from the comparison patterns are stored as fail information into fail registers 51, 52. Upon completion of the test, the information of the registers 51, 52 is fed to the control part. Thereby, plural pieces of the devices are tested and processed at high speeds. |
