| 摘要 |
PURPOSE:To achieve a tuning fork type crystal oscillation bar with low cost without using gold and palladium, by coating thin film of molybdenum to a thin quartz plate and etching it. CONSTITUTION:A molybdenum thin film 5 is vapor deposited on both sides of a thin quartz film 4. This is etched to form a tuning fork type molybdenum thin fim. A branch 6 for turning fork is then formed by etching quarrz with hydrofluoric acid. Thereafter, the molybdenum thin film is removed by a mixture of sulfuric acid and nitric acid. An electrode film 7 is vapor deposited on a remaining quartz bar and required part is removed by etching. A tuning fork type quartz oscillation bar can be achieved without using expensive metal such as gold, platinum, and palladium. |
