| 摘要 |
PURPOSE:To set the flow rates of various types of gases in the form of a real flow rate, by calculating the flow rate setting input from the flow rate and the correction constant to a designation process mode. CONSTITUTION:The 1st process mode is set at a process mode setting circuit 8, and a correction constant is selected through a data selecting circuit 10. Then a gas full-scale flow rate A of the 1st process mode is set to a data setting circuit 9 in the form of a correction constant and then written into a memory 11 through a starting circuit 13. Thereafter, the 1st process mode is set by a process mode setting circuit 8, and the flow rate is selected by the circuit 10. Then the circuit 13 is started after setting a flow rate B to the circuit 9. Thus a process 1 reads the flow rate A of the 1st process mode out of the memory 11 and then transmitted to a flow rate setting signal 12 from the flow rate B which is set to the circuit 9. |
