发明名称 Method of fabricating a Schottky barrier contact
摘要 A Schottky barrier contact is formed by depositing the conductor portion of the Schottky barrier contact on a surface of a semiconductor from which a conductivity determining dopant has been leached to create a surface region of reduced dopant concentration. This process is compatible with the formation of an ohmic contact to an increased conductivity portion of the semiconductor material, an unleached portion of the semiconductor material or to a leached portion of the semiconductor material.
申请公布号 US4313971(A) 申请公布日期 1982.02.02
申请号 US19790042920 申请日期 1979.05.29
申请人 RCA CORPORATION 发明人 WHEATLEY, JR., CARL F.
分类号 H01L21/285;(IPC1-7):H01L21/22;H01L29/48 主分类号 H01L21/285
代理机构 代理人
主权项
地址