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发明名称
METHOD AND DEVICE FOR ASTRIGMATISM CORRECTION IN SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPS556784(A)
申请公布日期
1980.01.18
申请号
JP19790036445
申请日期
1979.03.28
申请人
NIPPON ELECTRON OPTICS LAB
发明人
NAMAE TAKASHI;SOMEYA TERUO
分类号
H01J37/153;H01J37/21
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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